Concepedia

E. Yu. Gavrilin

EY

1

Publications

18

Citations

1

H-Index

2003

Active since

Affiliations

Institute of Microelectronics Technology and High Purity Materials(Current)

E. Yu. Gavrilin is an author at Institute of Microelectronics Technology and High Purity Materials.

Publications per year

2003–2003

1

Publications

1

SU8 photoresist as an etch mask for local deep anodic etching of silicon

V. V. Starkov, E. Yu. Gavrilin, J. Konle et al. · physica status solidi (a) · 2003 · 18 citations

Rows per page

1–1 of 1