Concepedia

K. J. Kim

KJ

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Publications

1

Citations

27

H-Index

1

Active since

2004

Affiliations

Sungkyunkwan University(Current)

K. J. Kim is an author at Sungkyunkwan University specializing in environmental chemistry, chemical engineering, and applied physics.

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Publications per year

2004–2004

1

Publications

1

Global warming gas emission during plasma cleaning process of silicon nitride using c-C4F8O/O2 chemistry with additive Ar and N2

K. J. Kim, C. H. Oh, N.-E. Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 27 citations

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