R. G. Alley is an author at RTI International specializing in applied physics, engineering, and electrical engineering.
Top concepts
EngineeringApplied PhysicsSurface ScienceElectrical EngineeringThin FilmsSemiconductorsMaterial ScienceOxide Semiconductors
Publications per year
1993–1996
2
2
Effect of rf power on remote-plasma deposited SiO2 films
S. V. Hattangady, R. G. Alley, G. G. Fountain et al. · Journal of Applied Physics · 1993 · 15 citations
Materials Science, Semiconductors, Electrical Engineering +12
Rows per page
1–2 of 2