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Naoya Akagawa

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1

Publications

11

Citations

1

H-Index

2015

Active since

Affiliations

Tohoku University(Current)

Naoya Akagawa is an author at Tohoku University specializing in microelectronics, materials science, and cmos technology.

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Publications per year

2015–2015

1

Publications

1

Atomically flattening of Si surface of silicon on insulator and isolation-patterned wafers

Tetsuya Goto, Rihito Kuroda, Naoya Akagawa et al. · Japanese Journal of Applied Physics · 2015 · 11 citations

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