Statistics
Publications
4
Citations
64
H-Index
4
Active since
1995
Affiliations
Yoshiyuki Negishi is an author at Photometrics (United States) specializing in mask fabrication, digital fabrication, and manufacturing engineering.
Publications per year
1995–2013
4
4
Using pattern shift to avoid blank defects during EUVL mask fabrication
Yoshiyuki Negishi, Yuki Fujita, Kazunori Seki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations
Engineering, Manufacturing Engineering, Digital Fabrication +11
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