Concepedia

R. J. Severens

RJ

15

Publications

551

Citations

13

H-Index

1994

Active since

Affiliations

Eindhoven University of Technology(Current)

Plasma (Macedonia)

R. J. Severens is an author at Eindhoven University of Technology specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsMaterial ScienceHydrogenChemistrySurface ScienceNatural SciencesThin FilmsPlasma Science

Publications per year

1994–2001

15

Publications

15

Plasma chemistry aspects of a-Si:H deposition using an expanding thermal plasma

M. C. M. van de Sanden, R. J. Severens, W. M. M. Kessels et al. · Journal of Applied Physics · 1998 · 119 citations · Full text

Engineering, Chemistry, Silicon On Insulator +18

Hydrogenated amorphous silicon deposited at very high growth rates by an expanding Ar–H2–SiH4 plasma

W. M. M. Kessels, R. J. Severens, Arno H. M. Smets et al. · Journal of Applied Physics · 2001 · 100 citations · Full text

Engineering, High Growth Rates, Plasma Processing +16

Surface reaction probability during fast deposition of hydrogenated amorphous silicon with a remote silane plasma

W. M. M. Kessels, M. C. M. van de Sanden, R. J. Severens et al. · Journal of Applied Physics · 2000 · 52 citations · Full text

Materials Science, Engineering, Physics +15

Characterization of plasma beam deposited amorphous hydrogenated silicon

R. J. Severens, G. J. H. Brussaard, M. C. M. van de Sanden et al. · Applied Physics Letters · 1995 · 45 citations · Full text

Optical Materials, Engineering, Cm−1 Sih2 Peak +18

Temperature and growth-rate effects on the hydrogen incorporation in a-Si:H

W. M. M. Kessels, R. J. Severens, M. C. M. van de Sanden et al. · Journal of Non-Crystalline Solids · 1998 · 39 citations

Hydrogen Energy Technology, Engineering, Hydrogen Transition +6

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