Concepedia

R. Fukute

RF

1

Publications

30

Citations

1

H-Index

2004

Active since

Affiliations

Nagoya University(Current)

R. Fukute is an author at Nagoya University specializing in microfabrication, physical chemistry, and applied physics.

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Publications per year

2004–2004

1

Publications

1

Beam study of the Si and SiO2 etching processes by energetic fluorocarbon ions

Hirotaka Toyoda, Hajime Morishima, R. Fukute et al. · Journal of Applied Physics · 2004 · 30 citations

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