Concepedia
Statistics
Publications
2
Citations
49
H-Index
Active since
2004
Peter Elbourn is an author specializing in evaluation, instrumentation, and engineering.
Publications per year
2004–2005
High-resolution EUV imaging tools for resist exposure and aerial image monitoring
Martin J. Booth, O. Brisco, Adam N. Brunton et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 37 citations
Engineering, Mechanical Engineering, Digital Imaging +9
High-resolution EUV Microstepper tool for resist testing and technology evaluation
Adam N. Brunton, Julian S. Cashmore, Peter Elbourn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 12 citations
Engineering, Electrical Engineering, Instrumentation +10
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