Concepedia

O. Brisco

OB

1

Publications

37

Citations

1

H-Index

2005

Active since

O. Brisco is an author specializing in instrumentation, calibration, and radiation imaging.

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Publications per year

2005–2005

1

Publications

1

High-resolution EUV imaging tools for resist exposure and aerial image monitoring

Martin J. Booth, O. Brisco, Adam N. Brunton et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 37 citations

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