Concepedia

Susumu Gotoh

SG

1

Publications

41

Citations

1

H-Index

2000

Active since

Affiliations

Canon (Japan)(Current)

Susumu Gotoh is an author at Canon (Japan) specializing in ophthalmology, computer engineering, and integrated circuits.

Top concepts

Publications per year

2000–2000

1

Publications

1

New concept for high-throughput multielectron beam direct write system

M. Muraki, Susumu Gotoh · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 41 citations

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