Statistics
Publications
3
Citations
118
H-Index
3
Active since
2003
Affiliations
K.-K. Kim is an author at University of Illinois Urbana-Champaign specializing in materials engineering, natural sciences, and materials science.
Publications per year
2003–2004
3
3
Inductively coupled plasma reactive ion etching of ZnO using BCl3-based plasmas
Han‐Ki Kim, J. W. Bae, Taekyung Kim et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 60 citations
Natural Sciences, Materials Engineering, Materials Science +17
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