Concepedia

L. Vedula

LV

Statistics

Publications

2

Citations

32

H-Index

2

Active since

1997

Affiliations

Clemson University(Current)

L. Vedula is an author at Clemson University specializing in semiconductor devices, engineering, and materials science.

Publications per year

1997–1999

2

Publications

2

Low temperature shallow junction formation using vacuum ultraviolet photons during rapid thermal processing

Rajendra Singh, K. C. Cherukuri, L. Vedula et al. · Applied Physics Letters · 1997 · 19 citations

Engineering, Materials Engineering, Materials Science +16

Importance of rapid photothermal processing in defect reduction and process integration

Rajendra Singh, V. Parihar, Yuanning Chen et al. · IEEE Transactions on Semiconductor Manufacturing · 1999 · 13 citations

Engineering, Materials Science, Heat Transfer +13

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