Paolo Bonfanti

Publications

Citations

H-Index

2006

Active since

Affiliations

Semiconductor Manufacturing International (China)(Current)

Paolo Bonfanti is an author at Semiconductor Manufacturing International (China) specializing in applied physics, electrical engineering, and engineering.

ORCID

Top concepts

EngineeringApplied PhysicsElectrical EngineeringNanoelectronicsDefect ToleranceMaterial ScienceMicroelectronicsMaterials Engineering

Publications per year

2006–2010

Publications

Advanced <i>in situ</i> pre-Ni silicide (Siconi) cleaning at 65nm to resolve defects in NiSix modules

Ruipeng Yang, Na Su, Paolo Bonfanti et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 51 citations

Engineering, Nisix Modules, Vacuum Device +16

Selective epitaxial growth of SiGe for strained Si transistors

X. Ning, Dameng Gao, Paolo Bonfanti et al. · Materials Science and Engineering B · 2006 · 11 citations

Electrical Engineering, Selective Epitaxial Growth, Engineering +4

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