Concepedia

Reisaku Matsuzaki

RM

1

Publications

107

Citations

1

H-Index

1974

Active since

Affiliations

Nippon Electric Glass (Japan)(Current)

Reisaku Matsuzaki is an author at Nippon Electric Glass (Japan) specializing in microfabrication, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical EngineeringMaterials EngineeringMaterials Fabrication

Publications per year

1974–1974

1

Publications

1

RF Sputter-Etching by Fluoro-Chloro-Hydrocarbon Gases

Naokichi Hosokawa, Reisaku Matsuzaki, Tatsuo Asamaki · Japanese Journal of Applied Physics · 1974 · 107 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Rows per page

1–1 of 1