Patricio Espinoza-Vallejos

Overview of low temperature co-fired ceramics tape technology for meso-system technology (MsST)

Mário Ricardo Góngora-Rubio, Patricio Espinoza-Vallejos, Luis Sola-Laguna et al. · Sensors and Actuators A Physical · 2001 · 434 citations

Materials Engineering, Materials Science, Electrical Engineering +9

Meso (Intermediate)-Scale Electromechanical Systems for the Measurement and Control of Sagging in LtcC Structures

Patricio Espinoza-Vallejos, Jihua Zhong, Mário Ricardo Góngora-Rubio et al. · MRS Proceedings · 1998 · 35 citations

Electrical Engineering, -Scale Electromechanical Systems, Engineering +9

Ceramic Tape-Based Meso Systems Technology

Haim H. Bau, Suresh G. K. Ananthasuresh, Jorge J. Santiago‐Avilés et al. · Micro-Electro-Mechanical Systems (MEMS) · 1998 · 14 citations

Materials Science, Ceramic Tapes, Engineering +15

Effect of parasitic capacitances on impedance measurements in microsensors structures: a numerical study

Nicolás H. Beltrán, Ricardo Finger, Jorge J. Santiago‐Avilés et al. · Sensors and Actuators B Chemical · 2003 · 10 citations

Numerical Study, Electrical Engineering, Engineering +7