X.W. Liu

A novel approach to the formation of amorphous carbon nitride film on silicon by ECR-CVD

S.L. Sung, C.-H. Tseng, Fu‐Kuo Chiang et al. · Thin Solid Films · 1999 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +14

Optical and structural properties of the amorphous carbon nitride by ECR-plasma

X.W. Liu, J.H. Lin, Chao‐Chi Tseng et al. · Materials Chemistry and Physics · 2001 · 14 citations

Natural Sciences, Materials Science, Physics +13

The effect of pressure control on a thermally stable a-C:N thin film with low dielectric constant by electron cyclotron resonance-plasma

X.W. Liu, J.H. Lin, Woo Jong et al. · Thin Solid Films · 2002 · 10 citations

Natural Sciences, Materials Science, Physics +15

The effect of argon on the electron field emission properties of α-C:N thin films

X.W. Liu, L. H. Chan, Wan‐Chen Hsieh et al. · Carbon · 2003 · 10 citations

Natural Sciences, Materials Science, Physics +10