A novel approach to the formation of amorphous carbon nitride film on silicon by ECR-CVD - Concepedia

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A novel approach to the formation of amorphous carbon nitride film on silicon by ECR-CVD

37

Citations

24

References

1999

Year

S.L. Sung, C.-H. Tseng, Fu‐Kuo Chiang, X. J. Guo, X.W. Liu, H.C. Shih

Thin Solid Films

Materials ScienceEngineeringNanoelectronicsSurface ScienceApplied PhysicsNovel ApproachSemiconductor Device FabricationAmorphous SolidMicroelectronicsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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