Statistics
Publications
3
Citations
115
H-Index
3
Active since
2002
Affiliations
Advantest (Japan)(Current)
Takeshi Haraguchi is an author at Advantest (Japan) specializing in photonics, beam optics, and physics.
Publications per year
2002–2005
3
3
Development of electromagnetic lenses for multielectron beam lithography system
Takeshi Haraguchi, T. Sakazaki, Shin-ichi Hamaguchi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 11 citations
Natural Sciences, Physics, Optics +12
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