Concepedia

R. Shimizu

RS

13

Publications

422

Citations

11

H-Index

1977

Active since

Affiliations

The University of Osaka(Current)

Hitachi (Japan)

Osaka Institute of Technology

National Institute of Advanced Industrial Science and Technology

R. Shimizu is an author at The University of Osaka specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsSurface ScienceThin FilmsInstrumentationMicroelectronicsMicroscopySimulation

Publications per year

1977–2014

13

Publications

13

Round Robin computer simulation of ejection probability in sputtering

Peter Sigmund, M. T. Robinson, M. I. Baskes et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 87 citations

Ejection Probability, Engineering, Monte Carlo +6

Investigation on surface compositions of CuNi alloy under Ar+ ion bombardment by ISS and in situ AES measurements

T. Okutani, M. Shikata, R. Shimizu · Surface Science · 1980 · 75 citations

Angular distribution of Si atoms sputtered by keV Ar+ ions

T. Okutani, M. Shikata, Shingo Ichimura et al. · Journal of Applied Physics · 1980 · 55 citations

Materials Science, Ion Implantation, Engineering +14

Computer simulation of damage processes during ion implantation

H. J. Kang, R. Shimizu, Tsutomu Saito et al. · Journal of Applied Physics · 1987 · 32 citations

Engineering, Nuclear Physics, Simulation +22

Evaluation of SIMS depth resolution using delta-doped multilayers and mixing–roughness-information depth model

A. Takano, Yoshikazu Homma, Yasuhiro Higashi et al. · Applied Surface Science · 2002 · 30 citations

Sims Depth Resolution, Delta-doped Multilayers, Engineering +3

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