M. Shikata is an author at The University of Osaka specializing in applied physics, microelectronics, and physics.
Top concepts
PhysicsEngineeringAtomic PhysicsApplied PhysicsInstrumentationSurface ScienceMaterial ScienceMicroelectronics
Publications per year
1980–1981
3
3
Angular distribution of Si atoms sputtered by keV Ar+ ions
T. Okutani, M. Shikata, Shingo Ichimura et al. · Journal of Applied Physics · 1980 · 55 citations
Sputtering of CuNi alloys at elevated temperature
M. Shikata, Ryōsuke Shimizu · Surface Science · 1980 · 42 citations
Rows per page
1–3 of 3