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Atsuki Asano

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Publications

1

Citations

22

H-Index

1

Active since

2017

Affiliations

Nagoya University(Current)

Atsuki Asano is an author at Nagoya University specializing in engineering, applied physics, and electrical engineering.

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Publications per year

2017–2017

1

Publications

1

Investigation of effects of ion energies on both plasma-induced damage and surface morphologies and optimization of high-temperature Cl<sub>2</sub>plasma etching of GaN

Zecheng Liu, Pan Jialin, Atsuki Asano et al. · Japanese Journal of Applied Physics · 2017 · 22 citations

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