Concepedia

Pan Jialin

PJ

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Publications

2

Citations

44

H-Index

2

Active since

2015

Affiliations

Nagoya University(Current)

Pan Jialin is an author at Nagoya University specializing in engineering, applied physics, and electrical engineering.

Top concepts

Publications per year

2015–2017

2

Publications

2

Suppression of plasma-induced damage on GaN etched by a Cl<sub>2</sub>plasma at high temperatures

Zecheng Liu, Pan Jialin, Takashi Kako et al. · Japanese Journal of Applied Physics · 2015 · 22 citations

, , +15

Investigation of effects of ion energies on both plasma-induced damage and surface morphologies and optimization of high-temperature Cl<sub>2</sub>plasma etching of GaN

Zecheng Liu, Pan Jialin, Atsuki Asano et al. · Japanese Journal of Applied Physics · 2017 · 22 citations

, , +13

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