Marı́a Aboy

Atomistic modeling of amorphization and recrystallization in silicon

Lourdes Pelaz, Luis A. Marqués, Marı́a Aboy et al. · Applied Physics Letters · 2003 · 74 citations

Materials Science, Materials Engineering, Defect Tolerance +14

Front-end process modeling in silicon

Lourdes Pelaz, Luis A. Marqués, Marı́a Aboy et al. · The European Physical Journal B · 2009 · 34 citations

Hardware Modeling, Engineering, Process Simulation Model +6

The laser annealing induced phase transition in silicon: a molecular dynamics study

Luis A. Marqués, Lourdes Pelaz, Marı́a Aboy et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 24 citations

Materials Science, Induced Phase Transition, Engineering +8

Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices

Lourdes Pelaz, Ray Duffy, Marı́a Aboy et al. · 2008 · 17 citations

Engineering, Silicon On Insulator, Molecular Dynamics +17

Boron pocket and channel deactivation in nMOS transistors with SPER junctions

Ray Duffy, Marı́a Aboy, V. C. Venezia et al. · IEEE Transactions on Electron Devices · 2005 · 11 citations

Electrical Engineering, Boron Pocket, Engineering +13