Koichiro Saga

Identification and Removal of Trace Organic Contamination on Silicon Wafers Stared in Plastic Boxes

Koichiro Saga, Takeshi Hattori · Journal of The Electrochemical Society · 1996 · 108 citations

Hazardous Waste, Engineering, Fouling +22

Contamination Removal by Single‐Wafer Spin Cleaning with Repetitive Use of Ozonized Water and Dilute HF

Takeshi Hattori, Tsutomu Osaka, Akira Okamoto et al. · Journal of The Electrochemical Society · 1998 · 49 citations

Chemical Engineering, Wafer Scale Processing, Contamination Removal +14

Influence of silicon-wafer loading ambients in an oxidation furnace on the gate oxide degradation due to organic contamination

Koichiro Saga, Takeshi Hattori · Applied Physics Letters · 1997 · 41 citations

Chemical Engineering, Electrical Engineering, Environmental Chemistry +13

Wafer Cleaning Using Supercritical CO<sub>2</sub> in Semiconductor and Nanoelectronic Device Fabrication

Koichiro Saga, Takeshi Hattori · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2007 · 25 citations

Engineering, Supercritical Fluid Chromatography, Chemistry +16

Influence of Surface Organic Contamination on the Incubation Time in Low‐Pressure Chemical Vapor Deposition

Koichiro Saga, Takeshi Hattori · Journal of The Electrochemical Society · 1997 · 20 citations

Engineering, Air Quality, Chemical Deposition +16