Statistics
Publications
2
Citations
41
H-Index
2
Active since
1993
Affiliations
Fujitsu (Japan)(Current)
S. Sago is an author at Fujitsu (Japan) specializing in engineering, electrical engineering, and electron beam lithography.
Publications per year
1993–1993
2
2
Electron-beam block exposure system for a 256 M dynamic random access memory
K. Sakamoto, Shunsuke Fueki, Susumu Yamazaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 12 citations
Engineering, Computer Engineering, Electrical Engineering +16
1–2 of 2