Statistics
Publications
4
Citations
154
H-Index
4
Active since
1998
Affiliations
Volker Guyenot is an author at Fraunhofer Institute for Applied Optics and Precision Engineering specializing in engineering, microfabrication, and materials science.
Publications per year
1998–2003
4
4
Electrostatic chucks for lithography applications
G. Kalkowski, Stefan Risse, Gerd Harnisch et al. · Microelectronic Engineering · 2001 · 25 citations
<title>Automated assembly of micro-optical components</title>
Ramona Eberhardt, Torsten Scheller, Guenther Tittelbach et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 14 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +13
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