Gerd Harnisch

Statistics

Publications

Citations

H-Index

Active since

2001

Affiliations

Fraunhofer Institute for Applied Optics and Precision Engineering(Current)

Gerd Harnisch is an author at Fraunhofer Institute for Applied Optics and Precision Engineering specializing in soft lithographic device fabrication, soft lithography, and materials science.

Publications per year

2001–2006

Publications

Electrostatic chucks for lithography applications

G. Kalkowski, Stefan Risse, Gerd Harnisch et al. · Microelectronic Engineering · 2001 · 25 citations

Engineering, Electrical Engineering, Materials Science +6

Electrostatic chuck for EUV masks

G. Kalkowski, Stefan Risse, Sandra Müller et al. · Microelectronic Engineering · 2006 · 10 citations

Engineering, Electrical Engineering, Mechatronics +1

1–2 of 2