Concepedia
Statistics
Publications
2
Citations
37
H-Index
Active since
2006
Affiliations
Applied Materials (United States)(Current)
IBM (United States)
Infineon Technologies (United States)
Roland Hampp is an author at Applied Materials (United States) specializing in electrical engineering, vlsi design, and microelectronics.
Top concepts
EngineeringVlsi DesignApplied PhysicsMicroelectronicsElectrical EngineeringThree-dimensional Heterogeneous IntegrationSurface ScienceMaterial ScienceIntegrated CircuitsComputer Engineering
Publications per year
2006–2007
Shallow Trench Isolation for the 45-nm CMOS Node and Geometry Dependence of STI Stress on CMOS Device Performance
A. Tilke, Chris Stapelmann, M. Eller et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 19 citations
Engineering, Vlsi Design, Integrated Circuits +18
STI Gap-Fill Technology with High Aspect Ratio Process for 45nm CMOS and beyond
A. Tilke, M. Culmsee, R. Jaiswal et al. · 2006 · 18 citations
Electrical Engineering, Physical Design (Electronics), Engineering +15
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