Moon Yong Lee Moon Yong Lee

Deposition and Electrical Characterization of Very Thin SrTiO₃ Films for Ultra Large Scale Integrated Dynamic Random Access Memory Application

Cheol Seong Hwang, Soon Oh Park, Chang Seok Kang et al. · Japanese Journal of Applied Physics · 1995 · 82 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication and Electrical Characterization of Pt/(Ba,Sr)TiO₃/Pt Capacitors for Ultralarge-Scale Integrated Dynamic Random Access Memory Applications

Soon Oh Park, Cheol Seong Hwang, Hag‐Ju Cho et al. · Japanese Journal of Applied Physics · 1996 · 71 citations

Engineering, Electrical Engineering, Materials Science +17

Control of Etch Slope during Etching of Pt in Ar/Cl₂/O₂ Plasmas

Won Jong Yoo, Jin Hwan Hahm, Hyoun Woo Kim et al. · Japanese Journal of Applied Physics · 1996 · 66 citations

Engineering, Electrical Engineering, Microfabrication +16

Preparation and Electrical Properties of SrTiO₃ Thin Films Deposited by Liquid Source Metal-Organic Chemical Vapor Deposition (MOCVD)

Chang Seok Kang, Cheol Seong Hwang, Hag‐Ju Cho et al. · Japanese Journal of Applied Physics · 1996 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +17

Deposition Characteristics of (Ba, Sr)TiO₃ Thin Films by Liquid Source Metal-Organic Chemical Vapor Deposition at Low Substrate Temperatures

Chang Seok Kang, Hag‐Ju Cho, Cheol Seong Hwang et al. · Japanese Journal of Applied Physics · 1997 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +17