Concepedia

Morgan E Haggerty

ME

1

Publications

19

Citations

1

H-Index

2016

Active since

Affiliations

Ohio University(Current)

Morgan E Haggerty is an author at Ohio University specializing in applied physics, materials engineering, and chemical engineering.

Top concepts

Thin FilmsEngineeringApplied PhysicsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsChemical EngineeringMaterials Engineering

Publications per year

2016–2016

1

Publications

1

Thermal oxidation of silicon in a residual oxygen atmosphere—the RESOX process—for self-limiting growth of thin silicon dioxide films

Jason T. Wright, Daniel J. Carbaugh, Morgan E Haggerty et al. · Semiconductor Science and Technology · 2016 · 19 citations

Self-limiting Growth, Growth Procedures, Engineering +16

Rows per page

1–1 of 1