M. K. El-Ghor

Damage nucleation and annealing in MeV ion-implanted Si

O. W. Holland, M. K. El-Ghor, C. W. White · Applied Physics Letters · 1988 · 59 citations

Engineering, Materials Science, Physics +17

MeV, self-ion implantation in Si at liquid nitrogen temperature; a study of damage morphology and its anomalous annealing behavior

O. W. Holland, C. W. White, M. K. El-Ghor et al. · Journal of Applied Physics · 1990 · 38 citations

Natural Sciences, Materials Science, Physics +17

Structural characterization of damage in Si(100) produced by MeV Si⁺ion implantation and annealing

M. K. El-Ghor, O. W. Holland, C. W. White et al. · Journal of materials research/Pratt's guide to venture capital sources · 1990 · 37 citations

Engineering, Materials Engineering, Materials Science +12

Formation of low dislocation density silicon-on-insulator by a single implantation and annealing

M. K. El-Ghor, S. J. Pennycook, F. Namavar et al. · Applied Physics Letters · 1990 · 26 citations

Engineering, Materials Engineering, Materials Science +17

Cavity Formation in Simox Structures

M. K. El-Ghor, Stephen J. Pennycook, T. P. Sjoreen et al. · MRS Proceedings · 1987 · 17 citations

Natural Sciences, Materials Science, Crystal Structure +3