J.P Endle

Iridium film growth with indium tris-acetylacetonate: oxygen and substrate effects

Yong Sun, J.P Endle, K. Christopher Smith et al. · Thin Solid Films · 1999 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +16

Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium

Yong Sun, Xiaoming Yan, N. Mettlach et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 29 citations

Natural Sciences, Chemistry, Materials Science +13

X-ray photoelectron spectroscopy study of TiN films produced with tetrakis(dimethylamido)titanium and selected N-containing precursors on SiO2

J.P Endle, Yang Sun, John White et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 22 citations

Natural Sciences, Chemistry, Materials Science +16

Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films

J.P Endle, Yong Sun, S. Madhukar et al. · Thin Solid Films · 2001 · 20 citations

Natural Sciences, Chemistry, Materials Science +16

Titanium-aluminum nitride film growth and related chemistry using dimethylamino-based precursors

J.P Endle, Yong Sun, Joel S. Silverman et al. · Thin Solid Films · 2001 · 10 citations

Natural Sciences, Chemistry, Materials Science +16