Publication | Closed Access
Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films
20
Citations
10
References
2001
Year
Materials ScienceChemical EngineeringOxidation ReactionsEngineeringSurface ScienceIridium FilmsChemistryChemical DepositionChemical Vapor DepositionIridium Precursor Pyrolysis
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