Concepedia

Cindy Kato

CK

Statistics

Publications

2

Citations

29

H-Index

2

Active since

2013

Affiliations

KLA (Israel)(Current)

Cindy Kato is an author at KLA (Israel) specializing in overlay metrology, quality engineering, and engineering.

Publications per year

2013–2013

2

Publications

2

Quality metric for accurate overlay control in <20nm nodes

Dana Klein, Eran Amit, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

, , +9

Overlay accuracy calibration

Eran Amit, Dana Klein, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 14 citations

, , +15

1–2 of 2