S.F. Lee

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Citations

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Active since

1995

Affiliations

University of California, Berkeley(Current)

S.F. Lee is an author at University of California, Berkeley specializing in real-time data monitoring, manufacturing engineering, and real-time systems.

ORCID

Publications per year

1995–1995

Publications

Prediction of wafer state after plasma processing using real-time tool data

S.F. Lee, Costas J. Spanos · IEEE Transactions on Semiconductor Manufacturing · 1995 · 34 citations

Computing, Manufacturing Engineering, Forecasting +13

RTSPC: a software utility for real-time SPC and tool data analysis

S.F. Lee, E.D. Boskin, Hao Cheng Liu et al. · IEEE Transactions on Semiconductor Manufacturing · 1995 · 17 citations

Engineering, Computer Science, Manufacturing Engineering +17

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