Statistics
Publications
2
Citations
24
H-Index
2
Active since
2013
Affiliations
Jan Beltman is an author at ASML (Netherlands) specializing in overlay control, engineering, and overlay metrology.
Publications per year
2013–2015
2
2
Toward 7nm target on product overlay for C028 FDSOI technology
Maxime Gatefait, Bertrand Le-Gratiet, P.-J. Goirand et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Manufacturing Engineering, Computer Architecture +16
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