Yasuhide Kawaguchi

Fluorinated materials for UV nanoimprint lithography

Yasuhide Kawaguchi, Fumiko Nonaka, Y. Sanada · Microelectronic Engineering · 2007 · 53 citations

Engineering, Materials Engineering, Materials Science +12

Synthesis of novel fluoropolymers for 157-nm photoresists by cyclopolymerization

S. Kodama, Isamu Kaneko, Yoko Takebe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 30 citations

Natural Sciences, Chemistry, Materials Science +17

Conversion of Alkyl Halides into Alcohols Using a Near Stoichiometric Amount of Molecular Oxygen: An Efficient Route to ¹⁸O- and ¹⁷O-Labeled Alcohols

Masaya Sawamura, Yasuhide Kawaguchi, Eiichi Nakamura · Synlett · 1997 · 29 citations

Natural Sciences, Chemical Engineering, Chemistry +13

Imprinted polymer stamps for UV-NIL

Tomi Haatainen, Tapio Mäkelä, Jouni Ahopelto et al. · Microelectronic Engineering · 2009 · 16 citations

Engineering, Materials Engineering, Materials Science +9

Preparation methods and characteristics of fluorinated polymers for mold replication

Kentaro Tsunozaki, Yasuhide Kawaguchi · Microelectronic Engineering · 2008 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +16