Concepedia

C.W. Gruenschlaeger

CG

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Publications

1

Citations

12

H-Index

1

Active since

1988

Affiliations

Hewlett-Packard (United States)(Current)

C.W. Gruenschlaeger is an author at Hewlett-Packard (United States) specializing in etching processes, semiconductor devices, and planarization techniques.

Publications per year

1988–1988

1

Publications

1

Application of a two-layer planarization process to VLSI intermetal dielectric and trench isolation processes

Douglas Sheldon, C.W. Gruenschlaeger, L. Kammerdiner et al. · IEEE Transactions on Semiconductor Manufacturing · 1988 · 12 citations

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