Concepedia

R.-S. Guo

RG

4

Publications

188

Citations

4

H-Index

1990

Active since

Affiliations

Massachusetts Institute of Technology(Current)

R.-S. Guo is an author at Massachusetts Institute of Technology specializing in systems engineering, engineering, and process control.

Top concepts

EngineeringSystems EngineeringProcess ControlOperations ResearchComputer EngineeringProcess OptimizationIndustrial EngineeringProduction ControlDesignBusiness

Publications per year

1990–2007

4

Publications

4

Process control system for VLSI fabrication

Emanuel M. Sachs, R.-S. Guo, Sung Soo Ha · IEEE Transactions on Semiconductor Manufacturing · 1991 · 113 citations

Flexible Recipe Generator, Engineering, Mechanical Manufacturing +12

Modeling, optimization and control of spatial uniformity in manufacturing processes

R.-S. Guo, Emanuel M. Sachs · IEEE Transactions on Semiconductor Manufacturing · 1993 · 47 citations

Engineering, Industrial Engineering, Computer-aided Design +21

On-line process optimization and control using the sequential design of experiments

Emanuel M. Sachs, R.-S. Guo, Sung Soo Ha · 1990 · 18 citations

Virtual Manufacturing, Engineering, Industrial Engineering +19

Multi-objectives exception management model for semiconductor back-end environment under turnkey service

R.-S. Guo, David M. Chiang, Fan Yun Pai · Production Planning & Control · 2007 · 10 citations

Customer Satisfaction, Engineering, Industrial Engineering +21

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