Statistics
Publications
3
Citations
107
H-Index
3
Active since
1990
Affiliations
Anne Pastol is an author at Centre National de la Recherche Scientifique specializing in chemistry, emission spectroscopy, and deposition rate.
Publications per year
1990–2013
3
3
Toward 7nm target on product overlay for C028 FDSOI technology
Maxime Gatefait, Bertrand Le-Gratiet, P.-J. Goirand et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Manufacturing Engineering, Computer Architecture +16
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