Takaoki Sasaki

Engineering of nitrogen profile in an ultrathin gate insulator to improve transistor performance and NBTI

Takaoki Sasaki, K. Kuwazawa, K. Tanaka et al. · IEEE Electron Device Letters · 2003 · 29 citations

Engineering, Electrical Engineering, Materials Science +17

Selective Dry Etching of HfO₂ in CF₄ and Cl₂/HBr-Based Chemistries

Takeshi Maeda, Hiroyuki Ito, Riichiro Mitsuhashi et al. · Japanese Journal of Applied Physics · 2004 · 26 citations

Engineering, Materials Engineering, Materials Science +17

Ultra-low thermal budget CMOS process for 65nm-node low-operation-power applications

Fumio Ootsuka, Hiroaki Ozaki, Takaoki Sasaki et al. · 2004 · 11 citations

Engineering, Electrical Engineering, Low-power Design +16