Concepedia

Baoxi Yang

BY

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Publications

2

Citations

27

H-Index

2

Active since

2013

Affiliations

Shanghai Institute of Optics and Fine Mechanics(Current)

Baoxi Yang is an author at Shanghai Institute of Optics and Fine Mechanics specializing in optical properties, microfabrication, and optical systems.

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Publications per year

2013–2015

2

Publications

2

Generation of trapezoidal illumination for the step-and-scan lithographic system

Ming Chen, Li‐Qun Chen, Aijun Zeng et al. · Applied Optics · 2015 · 17 citations

, , +13

Off-line inspection method of microlens array for illumination homogenization in DUV lithography machine

Fang Zhang, Jing Zhu, Baoxi Yang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 10 citations

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