Concepedia

M. P. Obrador

MP

Statistics

Publications

1

Citations

14

H-Index

1

Active since

2006

Affiliations

Universidade Estadual de Campinas (UNICAMP)(Current)

M. P. Obrador is an author at Universidade Estadual de Campinas (UNICAMP) specializing in coatings, optical coatings, and plasma-enhanced chemical vapor deposition.

Publications per year

2006–2006

1

Publications

1

Characterization and modeling of antireflective coatings of SiO2, Si3N4, and SiOxNy deposited by electron cyclotron resonance enhanced plasma chemical vapor deposition

S. N. M. Mestanza, M. P. Obrador, E. Rodríguez et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 14 citations · Full text

, , +17

1–1 of 1