Concepedia

Author

G. Aksenov

Intel (United States)

Also Known As

G. Aksenov

1

Publications

18

Citations

1

H-Index

9

Concepts

All Affiliations

Intel (United States)
GA

About

G. Aksenov is an author at Intel (United States) specializing in calibration, instrumentation, and optical diagnostics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Education

1

1

18

2

Engineering

1

1

18

3

Measurement

1

1

18

4

Optical Diagnostics

1

1

18

5

Calibration

1

1

18

G. Aksenov

×

1

Publications

18

Citations

1

H-Index

YearCitations

Measurement and analysis of EUV photoresist related outgassing and contamination

Ivan Pollentier, G. Aksenov, A. M. Goethals,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2009

18

Page 1