Concepedia

G. Aksenov

GA

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Publications

1

Citations

18

H-Index

1

Active since

2009

Affiliations

Intel (United States)(Current)

G. Aksenov is an author at Intel (United States) specializing in optics, chemical species identification, and extreme ultraviolet lithography.

Publications per year

2009–2009

1

Publications

1

Measurement and analysis of EUV photoresist related outgassing and contamination

Ivan Pollentier, G. Aksenov, A. M. Goethals et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 18 citations

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