Sathish Kumar Dhayalan

(Invited) Selective Epitaxial Growth of High-P Si:P for Source/Drain Formation in Advanced Si nFETs

Erik Rosseel, Sathish Kumar Dhayalan, Andriy Hikavyy et al. · ECS Transactions · 2016 · 43 citations

Engineering, Selective Epitaxial Growth, Si Bulk Finfets +16

On the manifestation of phosphorus-vacancy complexes in epitaxial Si:P films

Sathish Kumar Dhayalan, Jiri Kujala, J. Slotte et al. · Applied Physics Letters · 2016 · 18 citations · Full text

Materials Science, Semiconductors, Si Channel +11

Chemical vapor deposition of Si:C and Si:C:P films—Evaluation of material quality as a function of C content, carrier gas and doping

Sathish Kumar Dhayalan, Roger Loo, Andriy Hikavyy et al. · Journal of Crystal Growth · 2015 · 13 citations

Materials Science, Materials Engineering, Carrier Gas +10

(Invited) High Ge Content SiGe Thin Films: Growth, Properties and Integration

Andriy Hikavyy, Erik Rosseel, Sathish Kumar Dhayalan et al. · ECS Transactions · 2014 · 11 citations

Materials Science, Materials Engineering, Electrical Engineering +14