Concepedia

K.J. Kuijlaars

KK

5

Publications

152

Citations

5

H-Index

1995

Active since

Affiliations

Delft University of Technology(Current)

K.J. Kuijlaars is an author at Delft University of Technology specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1995–2007

5

Publications

5

Multi-scale modeling of chemical vapor deposition processes for thin film technology

Chris R. Kleijn, R. Dorsman, K.J. Kuijlaars et al. · Journal of Crystal Growth · 2007 · 92 citations

, , +13

A detailed model for low-pressure CVD of tungsten

K.J. Kuijlaars, Chris R. Kleijn, H.E.A. van den Akker · Thin Solid Films · 1995 · 18 citations

, , +5

Design and scale-up of chemical vapour deposition reactors for semiconductor processing

Chris R. Kleijn, K.J. Kuijlaars, H.E.A. van den Akker · Chemical Engineering Science · 1996 · 16 citations

, , +10

Multi-component diffusion phenomena in multiple-wafer chemical vapour deposition reactors

K.J. Kuijlaars, Chris R. Kleijn, H.E.A. van den Akker · The Chemical Engineering Journal and the Biochemical Engineering Journal · 1995 · 16 citations

, , +8

Some recent developments in chemical vapor deposition process and equipment modeling

Chris R. Kleijn, K.J. Kuijlaars, M. Okkerse et al. · Journal de Physique IV (Proceedings) · 1999 · 10 citations

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