Concepedia

Daniel Greenslit

DG

5

Publications

96

Citations

5

H-Index

2007

Active since

Affiliations

University at Albany, State University of New York(Current)

Daniel Greenslit is an author at University at Albany, State University of New York specializing in applied physics, engineering, and materials science.

Top concepts

Publications per year

2007–2011

5

Publications

5

Atomic layer deposition growth of a novel mixed-phase barrier for seedless copper electroplating applications

Sumit Kumar, Daniel Greenslit, Tonmoy Chakraborty et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 42 citations

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Characterization of Ultrathin PEALD-Grown RuCo Films for Diffusion Barrier and Copper Direct-Plate Applications

Daniel Greenslit, Eric Eisenbraun · ECS Transactions · 2011 · 17 citations

, , +15

Invetigations of Ultrathin Ru-WCN Mixed Phase Films for Diffusion Barrier and Copper Direct-Plate Applications

Daniel Greenslit, Sumit Kumar, Tonmoy Chakraborty et al. · ECS Transactions · 2008 · 16 citations

, , +18

Development of plasma-enhanced atomic layer deposition grown Ru–WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications

Daniel Greenslit, Tonmoy Chakraborty, Eric Eisenbraun · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 11 citations

, , +12

Development of Manufacturable Solutions for the Direct Plating of Copper on Robust ALD-Grown Barriers

Sumit Kumar, Daniel Greenslit, Eric Eisenbraun · ECS Transactions · 2007 · 10 citations

, , +18

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