Michael J. Word

Statistics

Publications

Citations

197

H-Index

Active since

2003

Affiliations

University of Illinois Urbana-Champaign(Current)

Michael J. Word is an author at University of Illinois Urbana-Champaign specializing in materials engineering, materials science, and electron beam lithography.

Publications per year

2003–2008

Publications

Nanometer-period gratings in hydrogen silsesquioxane fabricated by electron beam lithography

Michael J. Word, I. Adesida, Paul R. Berger · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 86 citations

Engineering, Materials Engineering, Materials Science +12

Processing dependent behavior of soft imprint lithography on the 1-10-nm scale

Hua Feng, Anshu Gaur, Yugang Sun et al. · IEEE Transactions on Nanotechnology · 2006 · 58 citations

Engineering, Materials Engineering, Materials Science +16

Comparative study of thermally cured and electron-beam-exposed hydrogen silsesquioxane resists

Michael J. Word, V. Kumar, I. Adesida · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +13

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