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Rainer Wolf

RW

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Publications

1

Citations

20

H-Index

1

Active since

2001

Affiliations

SENTECH Instruments (Germany)(Current)

Rainer Wolf is an author at SENTECH Instruments (Germany) specializing in applied physics, surface science, and engineering.

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Publications per year

2001–2001

1

Publications

1

Low-temperature ICPECVD of silicon nitride in SiH4–NH3–Ar discharges analyzed by spectroscopic ellipsometry and etch behavior in KOH and BHF

Rainer Wolf, K. Wandel, Bernd Gruska · Surface and Coatings Technology · 2001 · 20 citations

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