Michael L. Rieger

<title>Fast proximity correction with zone sampling</title>

John P. Stirniman, Michael L. Rieger · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 54 citations

Engineering, Computer Engineering, Manufacturing Engineering +16

Wet Abrasive Jet Machining to Prepare and Design the Cutting Edge Micro Shape

Dirk Biermann, Robert Aßmuth, Sebastian Schumann et al. · Procedia CIRP · 2016 · 43 citations · Full text

Engineering, Manufacturing Engineering, Mechanical Engineering +15

<title>Using behavior modeling for proximity correction</title>

Michael L. Rieger, John P. Stirniman · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 22 citations

Engineering, Computer Engineering, Electrical Engineering +14

Layout design methodolgies for sub-wavelength manufacturing

Michael L. Rieger, Jeffrey P. Mayhew, Sridhar Panchapakesan · 2001 · 19 citations

Engineering, Design, Manufacturing Engineering +14

Retrospective on VLSI value scaling and lithography

Michael L. Rieger · Journal of Micro/Nanolithography MEMS and MOEMS · 2019 · 19 citations · Full text

Engineering, Computer Engineering, Electrical Engineering +17